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6-Axis MEMS Motion Sensors

InvenSense’s 6-axis family of motion sensors with a 3‑axis gyroscope and a 3‑axis accelerometer on the same silicon die are the highest performance sensors in the market with the lowest noise, best temperature stability, and highest sensitivity accuracy. These key factors are key to create applications such as navigation, imaging, and augmented reality, with the best user experience.

This portfolio includes sensors with intelligent on‑board processing designed for the smart use of power where the main processor can be kept in low power mode, such as when a wearable device is keeping track of a user’s steps to count calorie expenditure. These devices enable manufacturers to eliminate the costly and complex selection, qualification, and system level integration of discrete devices, guaranteeing optimal motion performance for consumers.

The 6-axis family also supports highly configurable multi‑interface devices that for example support external devices such as manometers and barometers. Combined with the InvenSense MotionApps™ Platform, sensor management is offloaded from the operating system and the motion‑based complexities are abstracted using a structured set of APIs for application‑development.

6-Axis MotionTracking








Featured Video





Target Markets



  • Smartphones and Tablets

  • Hearables (TWS) and Wearables

  • Augmented Reality Glasses

  • Virtual Reality

  • High-Accuracy Robotics

  • Gaming Controllers

  • Drones, Flight Controllers







6-Axis Product Details

Product
ICM-42688-P

ICM-42688-V

ICM-42670-P

ICM-42605

ICM-40627

ICM-40609-D

ICM-20609
Purchase
StatusProductionProductionProductionProductionProductionProductionProduction
Key AttributeHighest Performance 6-axis IMU with advanced motion features and eventsHigh Precision 6-Axis MEMS MotionTracking Device with Advanced Sensor Fusion LibraryCost-Optimal Lowest power IMU with advanced motion featuresLow Power 6-axis IMU with high performance and advanced motion features and eventsHigh Performance 6-Axis MotionTracking IMU with Air Motion LibraryTDK SmartMotion™ solution designed for drone marketHigh Performance 6-Axis Motion Tracking IMU
Target Market & ApplicationsAR/VR/XR, Robotics, High-Performance IoTSensor Fusion with Quaternions, Yaw/Pitch/RollWearables, TWS, Gaming, IoTMobile Devices, Tablets, Cameras, IoTAir Mouse, Smart Remotes, Pointing DevicesDrones, GimbalsSmartphones, Tablets, Gaming, Wearables, Robotics, IoT 
# Axes6666666
SensorsAccel + GyroAccel + GyroAccel + GyroAccel + GyroAccel + GyroAccel + GyroAccel + Gyro
Embedded Processor(s)Advanced Pedometer and Event Detection (APEX)Advanced Pedometer and Event Detection (APEX)Advanced Pedometer and Event Detection (APEX)Advanced Pedometer and Event Detection (APEX)Advanced Pedometer and Event Detection (APEX)Advanced Pedometer and Event Detection (APEX)DMP
FeaturesPedometer, Tilt Detection, Tap Detection, Wake on Motion, Raise to Wake/Sleep, Significant Motion Detection, Real Time Clock (RTC) input, 19/18 bit data format in FIFO for Gyro/Accel Pedometer, Tilt Detection, Tap Detection, Wake on Motion, Raise to Wake/Sleep, Significant Motion Detection Real Time Clock (RTC) input, 19/18 bit data format in FIFO for Gyro/Accel Wake on Motion, Freefall Detection, Low-G detection, Pedometer, Tilt Detection, Significant Motion Detection, Independent FIFO ODRPedometer, Tilt Detection, Tap Detection, Wake on Motion, Raise to Wake/Sleep, Significant Motion DetectionPedometer, Tilt Detection, Tap Detection, Wake on Motion, Raise to Wake/Sleep, Significant Motion Detection32g Accel FSR and 32kHz ODR for max data collection. Best-in-class accuracy over temperatureDMP Features: 6-axis sensor fusion, gyro dynamic calibration, significant motion detection, pedometer
Package-Pin2.5 × 3 × 0.91 mm
LGA 14-leads
2.5 × 3 × 0.91 mm
LGA 14-leads
2.5 × 3 × 0.76 mm
LGA 14-leads
2.5 × 3 × 0.91 mm
LGA 14-leads
2.5 × 3 × 0.91 mm
LGA 14-leads
3 × 3 × 0.91 mm
LGA 24-leads
3 × 3 × 0.75 mm
LGA 16-leads

Gyroscope
Specs

FSR (dps)±15.625
±31.25
±62.5
±125
±250
±500
±1000
±2000
±15.625
±31.25
±62.5
±125
±250
±500
±1000
±2000
±250
±500
±1000
±2000 
±15.625
±31.25
±62.5
±125
±250
±500
±1000
±2000
±250
±500
±1000
±2000
±15.625
±31.25
±62.5
±125
±250
±500
±1000
±2000
±250
±500
±1000
±2000
Gyro ZRO (dps)±0.5±0.5±1±0.5±5±1±10 MAX
Gyro Offset Stability TC
(dps/°C)
±0.005
(0°C to 70°C)
±0.005
(0°C to 70°C)
±0.015
(-40°C to 85°C)
±0.02
(-40°C to 85°C)
±0.03
(-40°C to 85°C)
±0.01
(-40°C to 85°C)
±0.1 MAX
(-40°C to 85°C)
Gyro Sensitivity Error (%)±0.5%±0.5%±1%±0.5%±1%±0.5%±2% MAX
Gyro Sensitivity/Temp
(%/°C)
±0.005
(0°C to 70°C)
±0.005
(0°C to 70°C)
±0.007
(-40°C to 85°C)
±0.005
(-40°C to 85°C)
±0.01
(-40°C to 85°C)
±0.045
(-40°C to 85°C)
±0.024 MAX
(-40°C to 85°C)
Gyro Cross-Axis Sensitivity (%)±1.25%±1.25%±2%±1%±2%±1%±2%
Gyro Nonlinearity (%)±0.1%±0.1%±0.1%±0.1%±0.2%±0.1%±0.1%
Gyro Noise (dps/√Hz)0.00280.00280.0070.00380.0070.00450.006
Gyro Output Data Rate (Hz)12.5Hz to 32kHz12.5Hz to 32kHz12.5Hz to 1.6kHz12.5Hz to 8kHz12.5Hz to 8KHz1.5625Hz to 32kHz3.9Hz to 8kHz

Accelerometer
Specs

FSR (g)±2/4/8/16±2/4/8/16±2/4/8/16±2/4/8/16±2/4/8/16±4/8/16/32±2/4/8/16
Accel ZGO (mg)±20±20±25±20±60±40±100 MAX
Offset Stability TC
(mg/°C)
±0.15
(-40°C to 85°C)
±0.15
(-40°C to 85°C)
±0.15
(-40°C to 85°C)
±0.15
(-40°C to 85°C)
±0.5
(-40°C to 85°C)
±0.15
(-40°C to 85°C)
±1.5
(-40°C to 85°C)
Accel Sensitivity Error (%)±0.5%±0.5%±1%±0.5%±1%±0.5%±2% MAX
Accel Sensitivity/Temp
(%/°C)
±0.005
(-40°C to 85°C)
±0.005
(-40°C to 85°C)
±0.01
(-40°C to 85°C)
±0.005
(-40°C to 85°C)
±0.01
(-40°C to 85°C)
±0.007
(-40°C to 85°C)
±0.016 MAX
(-40°C to 85°C)
Accel Cross-Axis Sensitivity (%)±1%±1%±1%±1%±2%±1%±2%
Accel Nonlinearity (%)±0.1%±0.1%±0.1%±0.1%±0.2%±0.1±0.25% MAX
Accel Noise (μg/√Hz)XY: 65, Z: 70XY: 65, Z: 7010070110100210 MAX
Accel Output Data Rate (Hz)1.5625 Hz to 32 kHz1.5625 Hz to 32 kHz1.5625 Hz to 1.6 kHz1.5625 Hz to 8 kHz1.5625 Hz to 8 kHz1.5625 Hz to 32 kHz4 Hz to 4 kHz

General
Specs

Bus InterfaceSPI; I²C; I3C℠SPI; I²C; I3C℠SPI; I²C; I3C℠SPI; I²C; I3C℠SPI; I²CSPI; I²CSPI; I²C
FSYNC SupportYesYesYesYesYesYesYes
Memory (FIFO)2 Kbytes2 Kbytes2.25 Kbytes2 Kbytes2 Kbytes2 Kbytes4 Kbytes
Accel Current LP ModeNANA9.8 µA (@25Hz)46 µA (@200 Hz)46 µA (@200 Hz)60 µA57 µA (@100 Hz)
Gyro Current LN Mode0.73 mA0.73 mA0.42 mA0.52 mA0.52 mA0.61 mA2.6 mA 1.6 mA (Gyro LP mode @100Hz)
Accel Current LN Mode0.28 mA0.28 mA0.20 mA0.25 mA0.25 mA0.27 mA0.39 mA
6-Axis Current LN Mode0.88 mA0.88 mA0.55 mA0.65 mA0.65 mA0.77 mA 3 mA
1.9 mA (Gyro LP @100Hz + Accel LN)
Datasheet
 

NOT RECOMMENDED FOR NEW DESIGNS

Product
ICM-20602

ICM-20600

ICM-20603

MPU-6500
Purchase
StatusNR/NDNR/NDNR/NDNR/ND
Key AttributeHigh Performance 6-Axis Motion Tracking IMUHigh Performance 6-Axis Motion Tracking IMUHigh Performance 6-Axis Motion Tracking IMU with Specialized Software for HMD and VR6-Axis MotionTracking IMU
Target Market & ApplicationsGaming, Wearables, Robotics, IoT Smartphones, IoTHead Mount Tracking and VR ApplicationsGeneral IMU Market
# Axes6666
SensorsAccel + GyroAccel + GyroAccel + GyroAccel + Gyro
Embedded Processor(s)NoNoNoDMP
FeaturesWake on MotionWake on MotionExternal SW Senor Fusion Library with 1Khz Sensor Fusion output and bias tracking dynamic calibrationDMP Features: 6-axis sensor fusion, gyro dynamic calibration, Tap Detection, Android Orientation, Pedometer
Package-Pin3 × 3 × 0.75 mm
LGA 16-leads
2.5 × 3 × 0.91 mm
LGA 14-leads
3 × 3 × 0.75 mm
LGA 16-leads
3 × 3 × 0.9 mm
QFN 24-leads

Gyroscope
Specs

FSR (dps)±250
±500
±1000
±2000
±250
±500
±1000
±2000
±250
±500
±1000
±2000
±250
±500
±1000
±2000 
Gyro ZRO (dps)±1±1±1±5
Gyro Offset Stability TC
(dps/°C)
±0.01
(-40°C to 85°C)
±0.01
(-40°C to 85°C)
±0.01
(-40°C to 85°C)
±0.24
(-40°C to 85°C)
Gyro Sensitivity Error (%)±1%±1%±1%±3%
Gyro Sensitivity/Temp
(%/°C)
±0.016
(-40°C to 85°C)
±0.016
(-40°C to 85°C)
±0.02 MAX
(-40°C to 85°C)
±0.032
(-40°C to 85°C)
Gyro Cross-Axis Sensitivity (%)±1%±1%±1%±2%
Gyro Nonlinearity (%)±0.1%±0.1%±0.1%±0.1%
Gyro Noise (dps/√Hz)0.0040.0040.0040.01
Gyro Output Data Rate (Hz)3.9Hz to 8kHz3.9Hz to 8kHz3.9Hz to 8kHz4Hz to 8kHz

Accelerometer
Specs

FSR (g)±2/4/8/16±2/4/8/16±2/4/8/16±2/4/8/16
Accel ZGO (mg)±40±40±40±60
Offset Stability TC
(mg/°C)
X, Y: ±0.5, Z: ±1
(-40°C to 85°C)
X, Y: ±0.5, Z: ±1
(-40°C to 85°C)
X, Y: ±0.5, Z: ±1
(-40°C to 85°C)
X, Y: ±0.64, Z: ±1
(-40°C to 85°C)
Accel Sensitivity Error (%)±1%±1%±1%±3%
Accel Sensitivity/Temp
(%/°C)
±0.012
(-40°C to 85°C)
±0.012
(-40°C to 85°C)
±0.016 MAX
(-40°C to 85°C)
±0.026
(-40°C to 85°C)
Accel Cross-Axis Sensitivity (%)±1%±1%±1%±2%
Accel Nonlinearity (%)±0.3%±0.3%±0.3%±0.5%
Accel Noise (μg/√Hz)100100100300
Accel Output Data Rate (Hz)3.9 Hz to 4 kHz3.9 Hz to 4 kHz3.9 Hz to 4 kHz4 Hz to 1 kHz

General
Specs

Bus InterfaceSPI; I²CSPI; I²CSPI; I²CSPI; I²C
FSYNC SupportYesYesYesYes
Memory (FIFO)1 Kbyte1 Kbyte1 Kbyte512 bytes
Accel Current LP Mode40 µA (@100 Hz)40 µA (@100 Hz)40 µA (@100 Hz)7.27µA (@0.98 Hz)
Gyro Current LN Mode2.55 mA 1.08 mA (Gyro LP mode @100Hz)2.55 mA 1.08 mA (Gyro LP mode @100Hz)2.55 mA 1.08 mA (Gyro LP mode @100Hz)3.2 mA
Accel Current LN Mode0.32 mA0.32 mA0.32 mA0.45 mA
6-Axis Current LN Mode 2.79 mA
1.33 mA (Gyro LP @100Hz + Accel LN)
2.79 mA
1.33 mA (Gyro LP @100Hz + Accel LN)
2.79 mA
1.33 mA (Gyro LP @100Hz + Accel LN)
3.4 mA
Datasheet
 

END OF LIFE

Product
ICG-20660/L

ICM-20689

ICM-20690

ICM-20649

MPU-6050
Purchase
StatusEOL, LTB 01/31/2024
PCN-000626
EOL, LTB 01/31/2024
PCN-000626
EOL, LTB 01/31/2024
PCN-000613
EOL, LTB 01/31/2024
PCN-000615
EOL, LTB 01/31/2024
PCN-000614
Key AttributeHigh Performance 6-Axis IMU with Enhanced Camera SupportHigh Performance 6-Axis Motion Tracking IMU in legacy package6-Axis Dual-Mode (UI and OIS) MEMS Motion Tracking Device High Performance, High Sense Range 6-Axis Motion Tracking IMU 6-Axis MotionTracking IMU
Target Market & ApplicationsCamera Applications: EIS and OISSmartphones, Tablets, Drones, Gaming, Wearables Smartphones and Tablets, Head Mounted DisplaysSports, Wearable Sensors, High Impact ApplicationsGeneral IMU Market
# Axes66666
SensorsAccel + GyroAccel + GyroAccel + GyroAccel + GyroAccel + Gyro
Embedded Processor(s)NoDMPNoDMPDMP
FeaturesLow Sensitivity Errors gyrosDMP Features: 6-axis sensor fusion, gyro dynamic calibrationWake on MotionDMP based 6 & 9-axis Cal/Fusion, Android M features : Pedometer, Significant Motion, Bring to See, Basic Activity Classfication, Pick UpDMP Features: 6-axis sensor fusion, gyro dynamic calibration, Tap Detection, Android Orientation, Pedometer
Package-Pin3 × 3 × 0.75 mm
LGA 16-leads
4 × 4 × 0.9 mm
QFN 24-leads
2.5 × 3 × 0.91 mm
LGA 14-leads
3 × 3 × 0.9 mm
QFN 24-leads
4 × 4 × 0.9 mm
QFN 24-leads

Gyroscope
Specs

FSR (dps)±125
±250
±500
±250
±500
±1000
±2000
±31.25
±62.5
±125
±250
±500
±1000
±2000
±500
±1000
±2000
±4000
±250
±500
±1000
±2000 
Gyro ZRO (dps)±5±5±1±5±20
Gyro Offset Stability TC
(dps/°C)
±0.053
(-20°C to 75°C)
±0.04
(-40°C to 85°C)
±0.01
(-40°C to 85°C)
±0.025
(-40°C to 85°C)
±0.16
(-40°C to 85°C)
Gyro Sensitivity Error (%)ICG-20660: ±3% TYP ICG-20660L: ±1% MAX±2±0.5%±0.5%±3%
Gyro Sensitivity/Temp
(%/°C)
ICG-20660: ±0.032 (-20°C to 75°C) TYP ICG-20660L: ±0.032 (-20°C to 75°C) MAX±0.012
(-40°C to 85°C)
±0.01
(-40°C to 85°C)
±0.016
(-40°C to 85°C)
±0.016
(-40°C to 85°C)
Gyro Cross-Axis Sensitivity (%)±5%±2%±1%±2%±2%
Gyro Nonlinearity (%)±0.1%±0.1%±0.1%±0.1%±0.2%
Gyro Noise (dps/√Hz)ICG-20660: 0.0065 ICG-20660L: 0.0050.0060.0040.01750.005
Gyro Output Data Rate (Hz)1kHz to 8kHz3.9Hz to 8kHz3.91Hz to 32kHz4.4Hz to 9KHz4Hz to 8kHz

Accelerometer
Specs

FSR (g)±2/4/8/16±2/4/8/16±2/4/8/16±4/8/16/32±2/4/8/16
Accel ZGO (mg)X/Y: ±40 Z: ±65 ±20±40±65X/Y: ±50
Z: ±80
Offset Stability TC
(mg/°C)
±0.526
(-20°C to 75°C)
X, Y: ±0.5, Z: ±.75
(-40°C to 85°C)
X, Y: ±0.5, Z: ±0.7
(-40°C to 85°C)
±0.8
(0°C to 85°C)
X, Y: ±0.5, Z: ±0.86
(-0°C to 70°C)
Accel Sensitivity Error (%)ICG-20660: ±1% TYP ICG-20660L: ±1% MAX±2%±0.5%±0.5%±3%
Accel Sensitivity/Temp
(%/°C)
ICG-20660: ±0.026 (-20°C to 75°C) TYP ICG-20660L: ±0.026 (-20°C to 75°C) MAX±0.008
(-40°C to 85°C)
±0.008
(-40°C to 85°C)
±0.0168
(-40°C to 85°C)
±0.02
(-40°C to 85°C)
Accel Cross-Axis Sensitivity (%)±2%±2%±1%±2%±2%
Accel Nonlinearity (%)±0.5%±0.5%±0.3%±0.5%±0.5%
Accel Noise (μg/√Hz)220150100285400
Accel Output Data Rate (Hz)4 Hz to 4 kHz4 Hz to 4 kHz3.91 Hz to 4 kHz4.5 Hz to 4.5 kHz4 Hz to 1 kHz

General
Specs

Bus InterfaceSPI; I²CSPI; I²CSPI; I²CSPI; I²CSPI; I²C
FSYNC SupportYesYesYesYesYes
Memory (FIFO)512 bytes4 Kbytes1 Kbyte4 Kbytes1 Kbytes
Accel Current LP Mode57 µA (@100 Hz)57 µA (@100 Hz)50 µA (@100 Hz)68.9 µA (@102.3 Hz)10µA (@1.25 Hz)
Gyro Current LN Mode2.6 mA 1.6 mA (Gyro LP mode @100Hz)2.55 mA 1.2 mA (Gyro LP mode @100Hz)1.23 mA (Gyro LP Mode @102.3Hz)3.6 mA
Accel Current LN Mode0.39 mA0.33 mA68.9 µA (Accel LP Mode @102.3 Hz)500
6-Axis Current LN Mode3 mA 3 mA
1.9 mA (Gyro LP @100Hz + Accel LN)
2.7 mA
1.4 mA (Gyro LP @100Hz + Accel LN)
1.27 mA
(Gyro/Accel LP Mode @102.3Hz)
3.8 mA
Datasheet

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